High Speed Linear Table Machine

The LINEXO is a versatile laser processing workstation designed for high-precision applications in the electronic, precision engineering, and photovoltaic industries. This laser system is often used in R&D environments, as well as production of smaller substrates as e.g. ceramic PCBs. 

The axes of the machine are driven by linear motors. High traversing speed, with at the same time very good dynamics of the axes, are the result of this technology. The accuracy and precision of the system are derived from high-resolution glass scales, which are used as a measuring system in each axis.  

Performance benefits

  • Very flexible design with highest degree of customization for various applications
  • Flexible chuck design
  • High precise and ultrafast laser system
  • Industry 4.0 ready
  • Automatic camera calibration
  • Automated routines for reference runs
  • Automated vision system for precision alignment and scaling, offset, trapezoidal and rotation compensation


  • Up to 3 lasers sources with beam switches
  • InnoLas Postprocessor for CAD file transfer
  • Exhaust system
  • MES Interface
  • Auto focus
  • Integrated process metrology
  • INFINITY Scan to avoid stitching errors while increasing process speed (simultaneous axis and scanner movement

Technical data

Fixed optic or High Speed Scanner setup

X-Y / Z

< ± 5 μm abs. (± 0.197 Mils)

< ± 2 μm (± 0.079 Mils)

Substrate Size
18” x 24” (457 x 610 mm)

PCB, ceramic, silicon, metal

Image System
InnoLas μVision

Windows 10; IoT

Platform type
Granite based


  • Fully and semi-automatic High Speed Automation from InnoLas Solutions
  • Customized automation solutions
  • Stand Alone System
  • SMEMA compatible with 3rd party automation

Laser processes

  • Laser Drilling
  • Laser Depaneling
  • Laser Scribing
  • Laser Ablation
  • Laser Fusion Cutting
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