ULTAGO NX

TURNTABLE LASER MACHINE WITH TWO LINES

The ULTAGO NX is a powerful laser processing workstation designed for high-precision applications in the photovoltaic and electronic industry. It achieves throughput of 6000 wafers per hour for solar cells and is used in high-volume production environments. Different from linear table machines, in the turntable machine loading, unloading, alignment, as well as laser processing are carried out in parallel on up to two lines to reach optimum productivity. 

Benefits

  • Overall precision: 10 µm 
  • Up to 6000 wafers / hour 
  • 3-, 5- or even 8-Point alignment methods available (wafer edges or fiducials) 
  • Indexing table for parallel processing 
  • Single, dual or quadruple scanner setup 
  • Industry 4.0 ready 
  • Automatic camera calibration 
  • Automated routines for reference runs 
  • Automated vision system for precision alignment & scaling, offset, trapezoidal & rotation compensation 

Options

  • 4 process heads (single or dual line) 
  • InnoLas Postprocessor for CAD file transfer 
  • Exhaust system 
  • MES Interface 
  • Auto focus 
  • Integrated process metrology 
  • High precision calibration system 

Technical Data

Optic
High-speed Scanner

Accuracy
< ±5 µm

Repeatability
< ±2 µm

Substrate Size
M2 up to M6 (166 x 166 mm)

Thickness/Material
0.1 mm - 0.10 mm / cSi-wafer, ceramics

Image System
InnoLas μVision

Software
Windows 10 IoT

Platform type
Granite based

Automation

  • Fully automatic high-speed Automation from InnoLas Solutions 
  • Stand alone and production line integrated systems 
  • Customized automation solutions 
Are you interested in the ULTAGO NX and their performance benefits?

No matter whether you would like to get basic advice or already have very precise ideas – we will be happy to help you!

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