Laser Machine for cSi Solar Cell Processing

The next generation laser processing system for cSi solar cells 

The LUMION is a state of the art laser system for cSi solar cell processing. It achieves a throughput of up to 7,500 wafers/hour and is used in 24/7 high-volume production. The LUMION is available for various applicatons such as Laser Doped Selective Emitter (LDSE), Passivated Emitter Rear Contact cells (LCO) and laser direct cleaving- cell cutting (LDC). 

The system can be configured as a Stand Alone System with loading and unloading automation or as an integrated processing module into existing lines. 

Performance benefits

  • Simple and easy to maintain design 
  • Dedicated solution for cSi solar cell processing 
  • Throughput: Up to 7,500 wafer per hour 
  • Industry 4.0 ready 
  • Automatic camera calibration 
  • Automated routines for reference runs 
  • Automated vision system for precision alignment and scaling, offset, trapezoidal and rotation compensation 


  • InnoLas Postprocessor for CAD file transfer
  • Exhaust system
  • MES Interface
  • Auto focus
  • Integrated process metrology

Technical data

High Speed Scanner

<±25 μm (±0.984 Mils)

<±20 μm (±0.787 Mils)

Substrate Size
M2 up to M12 (210 x 210 mm)

Thickness / Material:
0.1 mm - 0.25 mm / cSi wafer, mono or poly crystalline silicon square/pseudo square

Image System
InnoLas μVision

Windows; 10 IoT


  • Fully automated Stand Alone System
  • Fully integrated module in printer line

Laser processes

  • Cell Cutting (LDC)
  • Laser Ablation
  • Local Doping
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