LUMION

Laser Machine for cSi Solar Cell Processing

The next generation laser processing system for cSi solar cells

The LUMION is a state of the art laser system for cSi solar cell processing. It achieves a throughput of up to 7,500 wafers/hour and is used in 24/7 high-volume production. The LUMION is available for various applicatons such as Laser Doped Selective Emitter (LDSE), Passivated Emitter Rear Contact cells (LCO) and laser direct cleaving- cell cutting (LDC).

The system can be configured as a Stand Alone System with loading and unloading automation or as an integrated processing module into existing lines.

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Performance benefits

Simple and easy to maintain design
Dedicated solution for cSi solar cell processing
Throughput: Up to 7,500 wafer per hour
Industry 4.0 ready
Automatic camera calibration
Automated routines for reference runs
Automated vision system for precision alignment and scaling, offset, trapezoidal and rotation compensation

Options

InnoLas Postprocessor for CAD file transfer
Exhaust system
MES Interface
Auto focus
Integrated process metrology

Technical data

Optic

High Speed Scanner

Accuracy

<±25 μm (±0.984 Mils)

Repeatability

<±20 μm (±0.787 Mils)

Substrate Size

M2 up to M12 (210 x 210 mm)

Thickness / Material:

0.1 mm - 0.25 mm / cSi wafer, mono or poly crystalline silicon square/pseudo square

Image System

InnoLas μVision

Software

Windows; 10 IoT

Automation

Fully automated Stand Alone System
Fully integrated module in printer line

Laser processes

Cell Cutting (LDC)
Laser Ablation
Local Doping