LUMION

LASER MACHINE FOR CSI-SOLAR CELL PROCESSING

The next generation laser processing system for cSi solar cells 

The LUMION is a state of the art laser system for cSi solar cell processing. It achieves a throughput of up to 7.500 wafers/ hour and is used in 24/ 7 high-volume production. The LUMION is available for various applicatons such as Laser Doped Selective Emitter (LDSE), Passivated Emitter Rear Contact cells (LCO) and laser direct cleaving- cell cutting (LDC). 

The system can be configured as a stand- alone system with loading and unloading automation or as an integrated processing module into existing lines. 

Benefits

  • Simple and easy to maintain design 
  • Dedicated solution for cSi solar cell processing 
  • Throughput: Up to 7,500 wafer per hour 
  • Industry 4.0 ready 
  • Automatic camera calibration 
  • Automated routines for reference runs 
  • Automated vision system for precision alignment & scaling, offset, trapezoidal & rotation compensation 

Options

  • InnoLas postprocessor for CAD data transfer, processing and laser recipe creation
  • Exhaust system 
  • MES Interface 
  • Auto focus 
  • Integrated process metrology 

Technical Data

Optic
high-speed Scanner

Accuracy
< ±25 μm

Repeatability
< ±20 μm

Substrate Size
M2 up to M12 (210 x 210 mm)

Thickness / Material:
0.1 mm - 0.25 mm/ cSi wafer, mono or poly crystalline silicon square / pseudo square

Image System
InnoLas μVision

Software
Windows 10 IoT

Automation

  • Fully automated standalone system 
  • Fully integrated module in printer line 
Are you interested in the LUMION and their performance benefits?

No matter whether you would like to get basic advice or already have very precise ideas – we will be happy to help you!

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