ULTAGO

Turntable Laser Machine

The ULTAGO is a powerful laser processing workstation designed for high precision applications in the photovoltaic, precision engineering, and electronic industries. This machine platform achieves high throughput with maximum accuracy in the industrial production of solar cells or ceramic substrates. Different from linear table machines, in the turntable machine loading, unloading, alignment, as well as laser processing are carried out in parallel in order to reach optimum productivity.

Benefits

  • Overall precision: 10 µm 
  • Up to 4,000 wafers / hour 
  • 3-, 5- or even 8-Point alignment methods available (wafer edges or fiducials) 
  • Indexing table for parallel processing 
  • Single, or dual scanner setup 
  • Industry 4.0 ready 
  • Automatic camera calibration 
  • Automated routines for reference runs 
  • Automated vision system for precision alignment and scaling, offset, trapezoidal and rotation compensation 

Options

  • 4 process heads (single line) 
  • InnoLas Postprocessor for CAD file transfer 
  • Exhaust system 
  • MES Interface 
  • Auto focus 
  • Integrated process metrology 
  • High precision calibration system 

Technical Data

Optic
High Speed Scanner

Accuracy
<±5 μm (±0.197 Mils)

Repeatability
<±2 μm (±0.079 Mils)

Substrate Size
M2 up to M6 (166 x 166 mm)

Thickness / Material
0.1 mm - 0.10 mm / cSi wafer, ceramics

Image System
InnoLas μVision

Software
Windows 10; IoT

Platform type
Granite based

Automation

  • Fully automatic High Speed Automation from InnoLas Solutions 
  • Stand Alone and production line integrated systems 
  • Customized automation solutions 

Laser processes

  • Laser Drilling
  • Laser Scribing
  • Laser Cutting
  • Laser Ablation
Are you interested in the ULTAGO and their performance benefits?

No matter whether you would like to get basic advice or already have very precise ideas – we will be happy to help you!

Scroll to Top

Your contact to InnoLas Solutions

InnoLas Solutions GmbH
Pionierstraße 7
82152 Krailling
Germany

P +49 89 8105 9168-1000

info@innolas-solutions.com

Are you interested in a product?

No matter whether you would like to get basic advice or already have very precise ideas – we will be happy to help you!

Are you interested in our services?

Let our consultants tell you about our wide range of services.

Ihr Kontakt zu InnoLas Solutions

InnoLas Solutions GmbH
Pionierstraße 6
82152 Krailling

P +49 89 8105 9168-1000

info@innolas-solutions.com

Sie interessieren sich für ein Produkt?

Ganz gleich ob Sie sich grundlegend beraten lassen möchten oder schon ganz genaue Vorstellungen haben – wir helfen Ihnen gerne weiter!

Sie interessieren sich für unsere Services?

Lassen Sie sich von unseren Beratern über unsere vielfältigen Services informieren.