The ULTAGO is a powerful laser processing workstation designed for high-precision applications in the photovoltaic, precision engineering, and electronic industries. This machine platform achieves high throughput with maximum accuracy in the industrial production of solar cells or ceramic substrates. Different from linear table machines, in the turntable machine loading, unloading, alignment, as well as laser processing are carried out in parallel in order to reach optimum productivity.


  • Overall precision: 10 µm 
  • Up to 4000 wafers / hour 
  • 3-, 5- or even 8-Point alignment methods available (wafer edges or fiducials) 
  • Indexing table for parallel processing 
  • Single, or dual scanner setup 
  • Industry 4.0 ready 
  • Automatic camera calibration 
  • Automated routines for reference runs 
  • Automated vision system for precision alignment & scaling, offset, trapezoidal & rotation compensation 


  • 4 process heads (single line) 
  • InnoLas Postprocessor for CAD file transfer 
  • Exhaust system 
  • MES Interface 
  • Auto focus 
  • Integrated process metrology 
  • High precision calibration system 

Technical Data

High-speed Scanner

< ±5 µm

< ±2 µm

Substrate Size
M2 up to M6 (166 x 166 mm)

0.1 mm - 0.10 mm / cSi-wafer, ceramics

Image System
InnoLas μVision

Windows 10 IoT

Platform type
Granite based


  • Fully automatic high-speed Automation from InnoLas Solutions 
  • Stand alone and production line integrated systems 
  • Customized automation solutions 
Are you interested in the ULTAGO and their performance benefits?

No matter whether you would like to get basic advice or already have very precise ideas – we will be happy to help you!

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